VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Silicon (n-type ?) freshly exposed edge (90 toa)
1

NORM
REGULAR
3
0
0
0
0
0
3

Silicon (n-type ?) freshly exposed edge (90 toa)
2003
5
10
15
31
59
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
29.729
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
15
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.5
200
4.00E-06
0
0
0
0
512
247
5441
1.10494
1.10568
2615
1.10494
2609
1.10494
2620
1.10494
2633
1.10495
2792
1.10495
2824
1.10495
2771
1.10496
2821
1.10496
2872
1.10496
2996
1.10496
2998
1.10497
2921
1.10497
2944
1.10497
2954
1.10498
3078
1.10498
3066
1.10498
3089
1.10499
3094
1.10499
3230
1.10499
3196
1.10499
3176
1.105
3191
1.105
3079
1.105
3250
1.10501
3235
1.10501
3275
1.10501
3264
1.10501
3252
1.10502
3318
1.10502
3289
1.10502
3402
1.10503
3383
1.10503
3359
1.10503
3468
1.10504
3403
1.10504
3563
1.10504
3574
1.10504
3636
1.10505
3591
1.10505
3632
1.10505
3841
1.10506
3886
1.10506
3952
1.10506
3871
1.10506
3994
1.10507
3898
1.10507
4130
1.10507
4178
1.10508
4220
1.10508
4325
1.10508
4311
1.10509
4252
1.10509
4336
1.10509
4365
1.10509
4477
1.1051
4499
1.1051
4412
1.1051
4367
1.10511
4574
1.10511
4446
1.10511
4545
1.10511
4436
1.10512
4469
1.10512
4240
1.10512
4420
1.10513
4313
1.10513
4338
1.10513
4444
1.10514
4276
1.10514
4300
1.10514
4216
1.10514
4256
1.10515
4143
1.10515
4033
1.10515
4234
1.10516
4157
1.10516
3985
1.10516
4078
1.10516
4043
1.10517
3951
1.10517
3964
1.10517
4068
1.10518
3968
1.10518
4119
1.10518
4149
1.10519
4347
1.10519
4312
1.10519
4477
1.10519
4659
1.1052
4662
1.1052
5055
1.1052
5072
1.10521
5197
1.10521
5230
1.10521
5441
1.10521
5422
1.10522
5325
1.10522
5252
1.10522
5282
1.10523
5154
1.10523
5053
1.10523
4753
1.10523
4747
1.10524
4496
1.10524
4484
1.10524
4220
1.10525
4027
1.10525
3866
1.10525
3799
1.10526
3845
1.10526
3590
1.10526
3544
1.10526
3507
1.10527
3383
1.10527
3226
1.10527
3130
1.10528
2934
1.10528
2963
1.10528
2811
1.10528
2826
1.10529
2649
1.10529
2622
1.10529
2580
1.1053
2676
1.1053
2885
1.1053
2836
1.10531
2883
1.10531
3066
1.10531
3146
1.10531
3103
1.10532
3137
1.10532
3191
1.10532
3296
1.10533
3047
1.10533
3236
1.10533
3169
1.10533
3164
1.10534
3217
1.10534
3280
1.10534
3316
1.10535
3342
1.10535
3376
1.10535
3476
1.10535
3466
1.10536
3509
1.10536
3573
1.10536
3542
1.10537
3463
1.10537
3607
1.10537
3576
1.10538
3493
1.10538
3316
1.10538
3439
1.10538
3556
1.10539
3258
1.10539
3217
1.10539
3268
1.1054
3133
1.1054
3174
1.1054
3143
1.1054
3019
1.10541
2906
1.10541
2882
1.10541
2816
1.10542
2698
1.10542
2545
1.10542
2536
1.10542
2359
1.10543
2163
1.10543
2011
1.10543
1891
1.10544
1695
1.10544
1665
1.10544
1397
1.10545
1315
1.10545
1187
1.10545
1175
1.10545
955
1.10546
926
1.10546
826
1.10546
692
1.10547
604
1.10547
542
1.10547
457
1.10547
426
1.10548
385
1.10548
364
1.10548
304
1.10549
331
1.10549
316
1.10549
323
1.10549
302
1.1055
300
1.1055
302
1.1055
285
1.10551
268
1.10551
287
1.10551
293
1.10552
276
1.10552
297
1.10552
294
1.10552
270
1.10553
299
1.10553
291
1.10553
281
1.10554
303
1.10554
275
1.10554
271
1.10554
291
1.10555
312
1.10555
305
1.10555
284
1.10556
307
1.10556
306
1.10556
296
1.10556
283
1.10557
277
1.10557
281
1.10557
288
1.10558
279
1.10558
275
1.10558
263
1.10559
297
1.10559
278
1.10559
282
1.10559
299
1.1056
304
1.1056
265
1.1056
311
1.10561
297
1.10561
279
1.10561
289
1.10561
287
1.10562
263
1.10562
278
1.10562
293
1.10563
268
1.10563
293
1.10563
270
1.10563
277
1.10564
285
1.10564
281
1.10564
314
1.10565
269
1.10565
276
1.10565
252
1.10566
247
1.10566
268
1.10566
262
1.10566
282
1.10567
308
1.10567
291
1.10567
260
1.10568
265
1.10568
291
1.10568
282
1.10568

Silicon (n-type ?) freshly exposed edge (90 toa)
2003
5
10
15
32
0
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.4
1
0
0
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
104.5
-0.0392157
2
counts
d
Transmission
d
pulse counting
0.4
50
4.00E-06
0
0
0
0
512
109
9432
1.78588
1.78975
363
1.78588
359
1.7859
331
1.78591
362
1.78593
366
1.78594
347
1.78596
334
1.78597
405
1.78599
369
1.786
442
1.78602
434
1.78603
422
1.78605
414
1.78606
433
1.78608
429
1.7861
468
1.78611
506
1.78613
496
1.78614
533
1.78616
491
1.78617
536
1.78619
493
1.7862
584
1.78622
512
1.78623
565
1.78625
607
1.78626
552
1.78628
558
1.78629
551
1.78631
621
1.78632
634
1.78634
605
1.78635
623
1.78637
622
1.78638
659
1.7864
667
1.78641
617
1.78643
630
1.78644
639
1.78646
652
1.78647
597
1.78649
668
1.78651
576
1.78652
621
1.78654
654
1.78655
601
1.78657
589
1.78658
602
1.7866
560
1.78661
588
1.78663
577
1.78664
572
1.78666
537
1.78667
534
1.78669
524
1.7867
533
1.78672
543
1.78673
540
1.78675
542
1.78676
492
1.78678
550
1.78679
524
1.78681
482
1.78682
484
1.78684
470
1.78685
468
1.78687
416
1.78688
405
1.7869
456
1.78692
444
1.78693
426
1.78695
418
1.78696
425
1.78698
425
1.78699
422
1.78701
399
1.78702
389
1.78704
386
1.78705
399
1.78707
418
1.78708
435
1.7871
431
1.78711
425
1.78713
425
1.78714
442
1.78716
390
1.78717
406
1.78719
429
1.7872
479
1.78722
465
1.78723
434
1.78725
450
1.78726
435
1.78728
493
1.78729
498
1.78731
540
1.78733
584
1.78734
572
1.78736
621
1.78737
745
1.78739
836
1.7874
988
1.78742
1047
1.78743
1356
1.78745
1516
1.78746
1874
1.78748
2174
1.78749
2560
1.78751
2994
1.78752
3537
1.78754
3963
1.78755
4493
1.78757
4880
1.78758
5144
1.7876
5271
1.78761
5374
1.78763
5201
1.78764
5100
1.78766
5013
1.78767
4730
1.78769
4723
1.7877
4883
1.78772
5039
1.78773
5571
1.78775
6167
1.78777
6798
1.78778
7739
1.7878
8421
1.78781
9052
1.78783
9432
1.78784
9166
1.78786
8673
1.78787
7952
1.78789
6890
1.7879
5780
1.78792
4499
1.78793
3455
1.78795
2556
1.78796
1799
1.78798
1340
1.78799
961
1.78801
729
1.78802
544
1.78804
427
1.78805
428
1.78807
343
1.78808
287
1.7881
248
1.78811
231
1.78813
248
1.78814
215
1.78816
217
1.78817
195
1.78819
191
1.7882
199
1.78822
179
1.78823
175
1.78825
178
1.78827
187
1.78828
193
1.7883
168
1.78831
170
1.78833
181
1.78834
185
1.78836
160
1.78837
170
1.78839
172
1.7884
181
1.78842
170
1.78843
166
1.78845
162
1.78846
167
1.78848
150
1.78849
150
1.78851
178
1.78852
165
1.78854
160
1.78855
131
1.78857
147
1.78858
184
1.7886
123
1.78861
155
1.78863
180
1.78864
159
1.78866
163
1.78867
184
1.78869
137
1.7887
169
1.78872
177
1.78873
137
1.78875
147
1.78877
150
1.78878
155
1.7888
148
1.78881
150
1.78883
165
1.78884
139
1.78886
145
1.78887
148
1.78889
152
1.7889
138
1.78892
143
1.78893
134
1.78895
126
1.78896
142
1.78898
146
1.78899
139
1.78901
119
1.78902
141
1.78904
135
1.78905
151
1.78907
129
1.78908
130
1.7891
131
1.78911
130
1.78913
138
1.78914
123
1.78916
114
1.78917
129
1.78919
114
1.7892
109
1.78922
129
1.78923
123
1.78925
133
1.78926
131
1.78928
114
1.7893
121
1.78931
126
1.78933
109
1.78934
118
1.78936
128
1.78937
137
1.78939
116
1.7894
113
1.78942
124
1.78943
123
1.78945
120
1.78946
114
1.78948
127
1.78949
130
1.78951
134
1.78952
127
1.78954
118
1.78955
137
1.78957
110
1.78958
120
1.7896
115
1.78961
123
1.78963
126
1.78964
124
1.78966
140
1.78967
119
1.78969
133
1.7897
149
1.78972
124
1.78973
123
1.78975

Silicon (n-type ?) freshly exposed edge (90 toa)
2003
5
10
15
32
2
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
54.69
1
0
0
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
45
-0.196078
2
counts
d
Transmission
d
pulse counting
0.2
200
4.00E-06
0
0
0
0
512
110
9992
0.494974
0.500916
5147
0.500916
5231
0.500892
5194
0.500868
5144
0.500844
5237
0.500821
5278
0.500797
5271
0.500773
5215
0.500749
5235
0.500725
5341
0.500701
5301
0.500678
5078
0.500654
5260
0.50063
5283
0.500606
5181
0.500582
5198
0.500559
5241
0.500535
5312
0.500511
5194
0.500487
5290
0.500464
5259
0.50044
5194
0.500416
5288
0.500392
5022
0.500369
5148
0.500345
5144
0.500321
5073
0.500297
5179
0.500274
5118
0.50025
5096
0.500226
5098
0.500202
5063
0.500179
5062
0.500155
5110
0.500131
5133
0.500108
5007
0.500084
5003
0.50006
5039
0.500037
4886
0.500013
4962
0.499989
4935
0.499966
4904
0.499942
4853
0.499918
4946
0.499895
4736
0.499871
4772
0.499847
4850
0.499824
4731
0.4998
4765
0.499776
4860
0.499753
4736
0.499729
4764
0.499705
4830
0.499682
4750
0.499658
4703
0.499635
4782
0.499611
4703
0.499587
4747
0.499564
4754
0.49954
4858
0.499517
4874
0.499493
4833
0.499469
4960
0.499446
4996
0.499422
4952
0.499399
5092
0.499375
5039
0.499352
5240
0.499328
5354
0.499304
5255
0.499281
5370
0.499257
5481
0.499234
5479
0.49921
5640
0.499187
5708
0.499163
5794
0.49914
5866
0.499116
6024
0.499093
6185
0.499069
6311
0.499046
6355
0.499022
6580
0.498999
6649
0.498975
6691
0.498952
6818
0.498928
7246
0.498905
7252
0.498881
7447
0.498858
7623
0.498834
7873
0.498811
8150
0.498787
8352
0.498764
8765
0.49874
8851
0.498717
9118
0.498694
9257
0.49867
9656
0.498647
9554
0.498623
9992
0.4986
9768
0.498576
9758
0.498553
9795
0.49853
9512
0.498506
9560
0.498483
9259
0.498459
8681
0.498436
8274
0.498413
7915
0.498389
7552
0.498366
7048
0.498342
6783
0.498319
6464
0.498296
6310
0.498272
6073
0.498249
5844
0.498226
5841
0.498202
5784
0.498179
5719
0.498156
5619
0.498132
5658
0.498109
5510
0.498086
5742
0.498062
5493
0.498039
5645
0.498016
5392
0.497992
5558
0.497969
5501
0.497946
5405
0.497922
5280
0.497899
5195
0.497876
5149
0.497852
4935
0.497829
4925
0.497806
4806
0.497783
4590
0.497759
4507
0.497736
4447
0.497713
4395
0.497689
4150
0.497666
4089
0.497643
4075
0.49762
3979
0.497596
4018
0.497573
3899
0.49755
3868
0.497527
3786
0.497504
3679
0.49748
3764
0.497457
3672
0.497434
3664
0.497411
3766
0.497387
3986
0.497364
4248
0.497341
4271
0.497318
4375
0.497295
4639
0.497272
4596
0.497248
4728
0.497225
4880
0.497202
4938
0.497179
4951
0.497156
5000
0.497132
5094
0.497109
5288
0.497086
5320
0.497063
5559
0.49704
5860
0.497017
5857
0.496994
6211
0.49697
6369
0.496947
6499
0.496924
6747
0.496901
6841
0.496878
7016
0.496855
7118
0.496832
7095
0.496809
7178
0.496786
7042
0.496762
6953
0.496739
6927
0.496716
6884
0.496693
6619
0.49667
6536
0.496647
6314
0.496624
6513
0.496601
6678
0.496578
7067
0.496555
7623
0.496532
7997
0.496509
8330
0.496486
8628
0.496463
8291
0.49644
7857
0.496417
7172
0.496394
6973
0.49637
6324
0.496347
5895
0.496324
5452
0.496301
4996
0.496278
4767
0.496255
4487
0.496232
4438
0.496209
4482
0.496186
4852
0.496163
4960
0.49614
5005
0.496117
4931
0.496095
5315
0.496072
5189
0.496049
5467
0.496026
5544
0.496003
5459
0.49598
5365
0.495957
5238
0.495934
4896
0.495911
4779
0.495888
4456
0.495865
4140
0.495842
3766
0.495819
3181
0.495796
2705
0.495773
2118
0.49575
1588
0.495727
1088
0.495705
761
0.495682
519
0.495659
313
0.495636
225
0.495613
181
0.49559
178
0.495567
178
0.495544
150
0.495521
133
0.495499
143
0.495476
145
0.495453
131
0.49543
157
0.495407
140
0.495384
128
0.495361
136
0.495339
126
0.495316
144
0.495293
125
0.49527
126
0.495247
124
0.495225
138
0.495202
110
0.495179
114
0.495156
140
0.495133
139
0.49511
139
0.495088
125
0.495065
135
0.495042
119
0.495019
125
0.494997
115
0.494974
end of experiment
